The Micro/Nano Fabrication Center at the University of Arizona
 

 

E-Beam Manuals

 

RV3, RV5, RV8 and RV12 Rotary Vane Pumps Instruction Manual, Issue P

A652-01-880

XDS Replacement Tip Seal Kit Instruction Manual, Issue C

A726-01-840

XDS Dry Pump Instruction Manual, Issue H

A726-01-880

PVEK Valves Instruction Manual, Issue G

C411-02-885

Pirani Vacuum Gauges (For use with 500, 1000, 1700, 2000& 4000) Instruction Manual, Issue D

D021-57-880

Penning Vacuum Gauge Heads CP25EK

Auto 306 Accessories: Water Cooled Crystal Holder, Crystal and Oscillator Unit Instruction Manual, Issue A

E086-67-880

Auto 306 Vacuum Coater, Volume 2, Instruction Manual, Issue E

E090-02-860

Auto 306 Accessories Rotary Workholder Volume 1- Installation and Maintenance Instructions, Issue B

E090-49-880, VOL 1

Auto 306 Accessories: Rotary Workholder Volume 2- Operating Instructions, Issue B

E090-49-880 VOL 2

Auto 306 Accessories: EB3 Multihearth Electron Beam Source Accessories, Issue A

E090-72-840

AUTO 306 Accessories: Workholder and Heater Accessories, Volume 1, Instruction and Maintenance Instructions, Issue F

E090-26-880

AUTO 306 Accessories: Manual Source Shutter and Electromagnetic Source Shutter Volume 1, Instruction and Maintenance Instructions, Issue G

E090-32-880G

AUTO 306 Accessories: EB3 Multihearth Electron Beam Source & Accessories, Volume 1, Instruction & Maintenance Instructions, Issue F

E090-72-880F

XT555H Instruction Manual, Issue A

NRA-266-880

FTM7 Film Thickness Monitor, Instruction Manual, Issue B

E086-69-880

Auto 306 Vacuum Coater with Turbo molecular Pumping System, Issue G

E090-03-860

Seiko STP 301/451 Turbomolecular Pump Series

Neslab Coolflow II Heat Exchanger

Neslab System II

 

     
University of Arizona | College of Engineering | 1230 E. Speedway Blvd. | Tucson, AZ 85721-0104
Phone: 520-626-1223 | Fax: 520-626-7877 | contact us
 
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