The Micro/Nano Fabrication Center at the University of Arizona


KLA-Tencor SP1 TBI

A highly sensitive production particle/defect detection tool located in our Class 100 cleanroom and setup for 200mm and 300mm Si substrates. This tool comes with the TBI (triple beam illumination) option. It is currently setup to measure defects on bare Si, PETEOS, electroplated as well as PVD Copper coated wafers. This is a new capability that has been made available through a cooperative agreement with one of our industrial partners.


University of Arizona | College of Engineering | 1230 E. Speedway Blvd. | Tucson, AZ 85721-0104
Phone: 520-621-3380 | Fax: 520-621-8881 | contact us
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