The Micro/Nano Fabrication Center at the University of Arizona
 

 

Harrick Plasma Cleaner

This tool is used to clean substrates and surfaces using an air or oxygen low intensity plasma, minimizing the need for expensive or toxic solvents. The low intensity plasma is ideal for surface cleaning at near ambient temperatures. Substrates are placed on a tray inside a cylindrical chamber of around 3" in diameter and 7" long. A vacuum is applied to allow for the creation of the low intensity plasma.

University of Arizona | College of Engineering | 1230 E. Speedway Blvd. | Tucson, AZ 85721-0104
Phone: 520-621-3380 | Fax: 520-621-8881 | contact us
 
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