The Micro/Nano Fabrication Center at the University of Arizona
 

 

Tencor-Surfscan 5500

Substrate particle/defect detection tool. Currently setup to detect, map particles/defects, and perform a size distribution analysis on both 100mm and 150mm Si wafer substrates.

 

University of Arizona | College of Engineering | 1230 E. Speedway Blvd. | Tucson, AZ 85721-0104
Phone: 520-621-3380 | Fax: 520-621-8881 | contact us
 
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