The Micro/Nano Fabrication Center at the University of Arizona
 

 

Tencor-Surfscan 5500

Wafer surface particle counter. Currently setup to detect, classify, and map particles on both 100mm and 150mm substrates.

 
University of Arizona | College of Engineering | 1230 E. Speedway Blvd. | Tucson, AZ 85721-0104
Phone: 520-621-3380 | Fax: 520-621-8881 | contact us
  
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