The Micro/Nano Fabrication Center at the University of Arizona
 

 

ABM Mask Aligner

 

 

Mask aligner used for transferring patterns using either standard UV or Deep UV wavelengths from masks onto substrates. Backside IR alignment capability. Substrates up to 150mm in diameter can be easily accomodated.

 

University of Arizona |Arizona Research Labs| 1230 E. Speedway Blvd. | Tucson, AZ 85721-0104
Phone: 520-621-3380 | Fax: 520-621-8881 | contact us
 
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