E-beam Evaporator

The BOC Edwards Auto 306 is an electron beam evaporation system used for deposition of ultra pure films of metals. Fully reproducible parameters provide consistent, repeatable deposition results. The most common metals deposited using this system at MFC are Au, Cu, Ti, Cr. System can deposit up to 4 different materials in series in the same run. This system is most suitable for films of a micron or less.