Alpha Step

This machine is to be used by authorized personnel only. For training contact the MFC Engineer in office # 201E phone 621-9849.

Enter all necessary information in the Log Book for each use.

1. Turn the Alpha Step on.
2. Verify that the substrate table is in a down position with at least ½ inch of clearance below the stylus.
3. Using the Y-adjustment knob to the left of the stage, move the stage forward.
4. Place the wafer to be measured on the stage.
5. Using the Y-adjustment knob, move the sample under the scanner cover and locate the wafer beneath the stylus.
6. Press and hold the table up key. The table will rise until the wafer surface contacts the stylus. It will stop automatically.
7. Press and release the table up key to toggle the stylus to its retracted position.
8. Watching the monitor use the X- and Y-adjustment knobs to position the sample with the line to be measured in the middle of the screen.
9. Press the table up key to bring the stylus down into contact with the wafer.
10. Using the adjustment knobs align the stylus just to the left of the step to be measured. The stylus will be in contact with the wafer so go slowly.
11. Press the ent key to the left of the table. You want to be using the 400:1 scan. Press reset, wait a few seconds and press the down key for a second then the up button again and make sure the stylus is in the correct place.
12. Press the start key. The stylus will scan across the lower layer and up onto the film being measured. It will stop when the scan is complete and the stylus will retract.
13. Press the level key. The cursors (dotted vertical lines) on both sides of the screen will change in size. At the top of each line is a rectangular box. Press the cursor key until the box above the right line blinks. When the box is blinking, the line can be moved. Pressing the cursor “left” button move the line to a flat spot at the base of the step.
14. Press the cursor button until the left box blinks. Pressing the “right” cursor button move the left line close to the other one. This references both measuring lines to “0”. IMPORTANT
15. Press the plot key.
16. Move the right cursor line to a level area on top of the step.
17. Move the left cursor to a level area at the base of the step. That would be the spot where the cursor was referenced to “0”.