Blanket Expose System

This machine is to be used by authorized personnel only. For training contact the MFC Engineer in office # 201E phone 621-9849.

Enter all necessary information in the Log Book for each use.

• Verify that the machine is turned on
• Lift the lid and make sure it is secure
• Place the mask/transparency on the glass. If using a chrome on quartz mask the chrome (dark) side must face up
• Place the resist coated side of the sample face sown directly on top of the mask. DO NOT USE a wafer that is larger than the quartz mask, it will break the wafer.
• Close the lid
• Verify that the light and fan toggle switches are in the UP position
• Turn the “Minutes” timer to just past the 1 minute mark. As soon as you releast the knob the lights come on, when the timer times out the lights automatically turn off.
• 1 minute is the exposure time for our AZ 3312 and AZ 1512, the time will need to be adjusted for thicker or thinner photoresist.

The timer will not time out and turn off if it is set for less than 1 minute.

• Open the lid remove the wafers one at a time to develop them
• Put masks away when finished and close the machine li