The Micro/Nano Fabrication Center at the University of Arizona


Plasma Preen II - 862

Located in our Class 100 cleanroom, the Plasma Preen plasma cleaner uses 2.5GHz microwave power to create an Air, Oxygen, or Argon plasma to clean substrates and surfaces, e.g. remove resist and organic contaminants etc. A Faraday cage is available for charge sensitive samples.


University of Arizona | Arizona Research Labs | 1230 E. Speedway Blvd. | Tucson, AZ 85721-0104
Phone: 520-621-9849 | Fax:(520) 626-7877  | contact us
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