The Micro/Nano Fabrication Center at the University of Arizona
 

 

Tegal 903e Plasma Etcher

Cassette To Cassette, in-line, single wafer plasma etcher. For etching silicon dioxide, silicon nitride, and polyimides. Capability to etch vias and contacts with anisotropic or sloped profiles.

 

University of Arizona | College of Engineering | 1230 E. Speedway Blvd. | Tucson, AZ 85721-0104
Phone: 520-621-3380 | Fax: 520-621-8881 | contact us
 
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