The Micro/Nano Fabrication Center at the University of Arizona


Tegal 903e Plasma Etcher

Cassette To Cassette, in-line, single wafer plasma etcher. For etching silicon dioxide, silicon nitride, and polyimides. Capability to etch vias and contacts with anisotropic or sloped profiles.


University of Arizona | College of Engineering | 1230 E. Speedway Blvd. | Tucson, AZ 85721-0104
Phone: 520-621-3380 | Fax: 520-621-8881 | contact us
Contact The University of Arizona The College of Engineering Map The Micro / Nano Fabrication Center Logo