The Micro/Nano Fabrication Center at the University of Arizona


Thermal Physical Vapor Deposition (PVD)

Located in our Class 100 cleanroom, this system allows for the thermal deposition of metals including Cu, Al, AlSi, In, etc. Deposition occurs under high vacuum. In its current configuration, this system is more suitable for deposition of thin films of more than a hundred nanometers or so.



University of Arizona | Arizona Research Labs | 1230 E. Speedway Blvd. | Tucson, AZ 85721-0104
Phone: 520-621-9849 | Fax:(520) 626-7877  | contact us
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