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Equipment & Instrumentation

Under Description: Click on text for brief Overview


Description
Operating Instructions
Manuals
CLEANS

Eco-Snow

Spin Rinse Dryer (100 mm-150 mm)

 

Spin Rinse Dryer (200 mm)

 
DEPOSITION

Nitride LPCVD

PolySi LPCVD

LTO LPCVD

Doped PolySi / LTO LPCVD

 
 
PLASMA ETCH
AGS RIE Etcher

Tegal

   
LITHOGRAPHY
Cee 200 Spin Coater

Solitec Spin Coater

Blue M Oven    
 
New CapabilityEbeam Lithography  
Manuals Elionix ELS 7000
UV Cure Station    
CHEMICAL & MECHANICAL POLISH

372

   
   
METROLOGY / INSPECTION
Alpha-Step 200 Manual
 

AFM

 
CDE Resmap
CDE Operations Manual
 
Climet Counter  
Climet CI-6300 Manual

KLA-Tencor P15

 

Tencor Surfscan 5500

 
Tencor Surfscan SP1  

Analytical Balance

 
PACKAGING

Die Attach

   
 
WET BENCHES & HOODS

Wet Bench & Hood(Litho Area)

   

Solvent Hood (Litho Area)

   

Wet Bench & Hood (Chase Area)

   

Wet Bench(Chase Area)

   

Page 2: SUPPORT EQUIPMENT

 

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