Equipment Matrix Micro/Nano Fabrication Center

Equipment Matrix

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Use Caution when Operating
Down for Maintenance

Support Equipment
Description	Status	Operating Instructions	Manuals
CLEANS
Plasma Preen
Plasma Cleaner
Eco-Snow
Spin Rinse Dryer (100 mm-150 mm)
Spin Rinse Dryer (200 mm)
DEPOSITION
E-Beam Evaporator
Thermal Evaporator
Nitride LPCVD
PolySi LPCVD
LTO LPCVD
Doped PolySi / LTO LPCVD
Oxidation Furnace
Anneal Furnace
Series 900 Micro PECVD
ETCH
AGS RIE Etcher
Tegal
LITHOGRAPHY
Cee 200 Spin Coater
Solitec Spin Coater
Blue M Oven
Blanket Exposure
K.S. Mask Aligner
ABM Mask Aligner
UV Cure Station
POLISH
372

METROLOGY / INSPECTION
Alpha Step
Filmetrics
AFM
Signatone ProbeStation-Scope
HLT-160 Leak Detector
Four Point Probe
Tencor Surfscan
Analytical Balance
PACKAGING
Wafer Saw
Die Attach
Wire Bonder
FACILITIES
Wet Bench & Hood (Litho Area)
Solvent Hood (Litho Area)
Wet Bench & Hood (Chase Area)
Wet Bench(Chase Area)
DI Water Production
Waste Neutralization

Last Update:9/3/08 Omid Mahdavi