The Center consists of approximately
15,000 sqft of space, of which approximately 3,500 sqft is certified Class
100 (ISO Class 5) and 300 sqft of Class 10 (ISO Class 4) clean room space, a high capacity ultra pure water system, an automated
wastewater neutralization system, chemical storage bunkers, a mechanical shop, gas storage space, and a semiconductor grade Liquid/Gas N2 distribution system. At the present time, there is plenty of space for future capabilities along with space available to potential outside clients.
The Class 100 clean room capabilities:
- A thermal oxidation and anneal area: furnaces that will handle up to 5" substrates.
- Plasma etching & ashing area: low power cleaning, a
Microwave system for higher power cleaning, Reactive Ion Etch (RIE) systems.
- Metrology area: 4
pt probes, ellipsometers, thin film reflectometers, profiler and step height measurement tools.
- Metallization area: e-beam deposition, thermal evaporators, sputter deposition.
The Class 10 clean room has its own acid wet bench, SRDs, an
SVG Vertical Furnace. This is a separate area
with a separate entrance.
The Chase area is sizeable and has a better than a Class 10,000 estimated rating:
The chase area contains all facilitation requirements,
acid & solvent exhaust, easy access to power, nitrogen, UPW and city water, drains to the neutralization
system, space for vacuum pumps, etc.
Packaging area: wafer dicing saw and wire bonders.
Wet processing area: wet benches (one exhausted).
The "Water Room" contains all of the purification equipment along with
a 2,000gallon Halar lined dynamic storage tank. The waste water neutralization system
controls the effluent streams from the cleanroom and chase areas prior to discharge into the county system.
have a 2,000 gallon liquid nitrogen storage tank that is used in providing
semiconductor grade Liquid/Gas N2 from AirProducts Inc. to the Center.
Safety is always First!